Title

In-situ patterning. Selective area deposition and etching. Symposium

Title Supplement

Symposium held November 29 - December 1, 1989, Boston, Massachusetts, U.S.A.

Person Involved

Corporate Author

Materials Research Society -MRS-

Publisher

Publishing Place

Pittsburgh, Pa.

Publication Date

1990

Series

Materials Research Society symposia proceedings; 158

ISBN

1-558-99046-1

Conference