Title

Modeling aspects in optical metrology IV

Title Supplement

13 - 14 May 201, Munich, Germany

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Europe, Cardiff

Publisher

Publishing Place

Bellingham, WA

Publication Date

2013

Series

Proceedings of SPIE; 8789

ISBN

978-0-8194-9605-8

Conference