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Title
Towards synthesis of micro-/nano-systems. 11th International Conference on Precision Engineering, ICPE 2006
Title Supplement
August 16 - 18, 2006, Tokyo, Japan
Person Involved
Corporate Author
Japan Society of Precision Engineering -JSPE-, Tokyo
European Society for Precision Engineering and Nanotechnology -EUSPEN-
Publisher
Publishing Place
London
Publication Date
2007
Series
JSPE publication series; 5
ISBN
1-8462-8558-5