Title

Multichamber and in-situ processing of electronic materials

Title Supplement

10-11 October 1989, Santa Clara, California

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

1990

Series

Proceedings of SPIE; 1188

ISBN

0-8194-0224-9

Conference