Title

Mikro-System-Technik Chemnitz 2010. Mikromechanik & Mikroelektronik

Title Supplement
10. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik; 20./21. Oktober 2010
Person Involved
Corporate Author
TU Chemnitz
Publisher
Publishing Place
Chemnitz
Publication Date
2010
ISBN
978-3-00-032052-1
Conference