Title

Modeling aspects in optical metrology

Title Supplement

18 - 19 June 2007, Munich, Germany

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Europe, Cardiff

Publisher

Publishing Place

Bellingham, WA

Publication Date

2007

Series

Proceedings of SPIE; 6617

ISBN

0-8194-6759-6

978-0-8194-6759-1

Conference