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Title
Materials, integration and technology for monolithic instruments
Title Supplement
Symposium held March 29 - 30, 2005, San Francisco, California, U.S.A.; Symposium D, held at the 2005 MRS spring meeting
Person Involved
Corporate Author
Materials Research Society -MRS-
Publisher
Publishing Place
Warrendale, Pa.
Publication Date
2005
Series
Materials Research Society Symposium Proceedings; 869
ISBN
1-558-99823-3