Title

Micromachining and Microfabrication Process Technology XVII. Proceedings

Title Supplement

24-26 January 2012, San Francisco, California, United States

Editor(s)

Maher, Mary Ann

Resnick, Paul J.

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2012

Series

Proceedings of SPIE; 8248

ISSN

0038-7355

ISBN

978-0-8194-8891-6

Conference