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Title
Micromachining and microfabrication process technology XVIII
Title Supplement
5 and 7 February 2013, San Francisco, California, United States
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2013
Series
Proceedings of SPIE; 8612
ISBN
978-0-8194-9381-1