Title

International Symposium on Microelectronics 2003. Proceedings

Title Supplement

November 18 - 20, 2003, Hynes Convention Center, Boston, MA

Corporate Author

International Microelectronics and Packaging Society -IMAPS-

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Washington, D.C.

Publication Date

2003

Series

Proceedings of SPIE; 5288

ISBN

0-930815-71-8

0-8194-5189-4

Conference