Options
Title
MOEMS and miniaturized systems XI
Title Supplement
24 - 25 January 2012, San Francisco, California
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2012
Series
Proceedings of SPIE; 8252
ISBN
978-0-8194-8895-4