Title

Optical micro- and nanometrology in microsystems technology

Title Supplement

5 - 7 April 2006, Strasbourg, France

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Europe, Cardiff

Publisher

Publishing Place

Bellingham, WA

Publication Date

2006

Series

Proceedings of SPIE; 6188

ISBN

0-8194-6244-6

Conference