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Title
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002
Title Supplement
6 - 8 May 2002, Cannes, France
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2002
Series
Proceedings of SPIE; 4755
ISBN
0-8194-4518-5