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Title
Mikro-System-Technik Chemnitz '05: Mikromechanik & Mikroelektronik
Title Supplement
7. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik, 26./27. Oktober 2005
Person Involved
Publisher
Publishing Place
Chemnitz
Publication Date
2005
ISBN
3-00-016889-3