Title

Tribology issues and opportunities in MEMS. Proceedings of the NSF/AFOSR/ASME Workshop
Institut
National Science Foundation -NSF
United States, Air Force, Office of Scientific Research -AFOSR-
American Society of Mechanical Engineers -ASME-
Verlag
Verlagsort
Dordrecht
Datum
1998
ISBN
0-7923-5024-3
Konferenz