Title

Tribology issues and opportunities in MEMS. Proceedings of the NSF/AFOSR/ASME Workshop

Person Involved

Corporate Author

National Science Foundation -NSF

United States, Air Force, Office of Scientific Research -AFOSR-

American Society of Mechanical Engineers -ASME-

Publisher

Publishing Place

Dordrecht

Publication Date

1998

ISBN

0-7923-5024-3

Conference