Title

Testing, reliability, and application of micro- and nano-material systems

Title Supplement

3 - 5 March 2003, San Diego, California, USA

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

National Institute of Standards and Technology -NIST-

Publisher

Publishing Place

Bellingham, WA

Publication Date

2003

Series

Proceedings of SPIE; 5045

ISBN

0-8194-4850-8

Conference