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Title
Micromachining and microfabrication process technology XIII. Proceedings
Title Supplement
22 - 23 January 2008, San Jose, California, USA
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2008
Series
Proceedings of SPIE; 6882
ISBN
978-0-8194-7057-7