Title

IEEE 27th International Conference on Micro Electro Mechanical Systems, MEMS 2014. Vol.1

Title Supplement

San Francisco, California, USA, 26 - 30 January 2014

Person Involved

Corporate Author

Institute of Electrical and Electronics Engineers -IEEE-

IEEE Robotics and Automation Society

Publisher

Publishing Place

Piscataway, NJ

Publication Date

2014

ISBN

978-1-4799-3510-9

978-1-4799-3508-6

978-1-4799-3509-3

Conference