Title

IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023

Title Supplement
Munich, Germany, 15-19 January 2023
Editor(s)
Barniol, Núria
Corporate Author
Institute of Electrical and Electronics Engineers -IEEE-  
Publisher
Publication Date
2023
ISBN
978-1-6654-9309-3
978-1-6654-9308-6
DOI
Conference
Acronym
MEMS
Language
English