Title

Dimensional Optical Metrology and Inspection for Practical Applications IV

Title Supplement

Baltimore, Maryland, United States, April 20, 2015

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2015

Series

Proceedings of SPIE; 9489

ISBN

978-1-62841-605-3

Conference