Title

Micromachining and Microfabrication Process Technology X

Title Supplement

25 - 27 January 2005, San Jose, California, USA

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2005

Series

Proceedings of SPIE; 5715

ISBN

0-8194-5689-6

Conference