Title

Two- and Three-Dimensional Methods for Inspection and Metrology VI

Title Supplement

10-11 August 2008, San Diego, California, USA

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2008

Series

Proceedings of SPIE; 7066

ISBN

978-0-8194-7286-1

0-8194-7286-7

Conference