Title

Smart Sensors, Actuators, and MEMS IV

Title Supplement

4 May 2009, Dresden, Germany

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2009

Series

Proceedings of SPIE; 7362

ISBN

0-8194-7636-6

978-0-8194-7636-4

Conference