Title

Nondestructive evaluation and reliability of micro- and nanomaterial systems

Title Supplement

18 - 19 March 2002, San Diego, USA

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2002

Series

Proceedings of SPIE; 4703

ISBN

0-8194-4451-0

Conference