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Title
Smart sensors, actuators, and MEMS V
Title Supplement
18-20 April 2011, Prague, Czech Republic
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2011
Series
Proceedings of SPIE; 8066
ISBN
978-0-8194-8655-4