Title

Instrumentation, metrology, and standards for nanomanufacturing IV

Title Supplement

2 - 4 August 2010, San Diego, California, United States; Part of SPIE optics + photonics

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2010

Series

Proceedings of SPIE; 7767

ISBN

978-0-8194-8263-1

Conference