Title

MEMS components and applications for industry, automobiles, aerospace, and communication

Title Supplement

22 - 23 October 2001, San Francisco, USA

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2001

Series

Proceedings of SPIE; 4559

ISBN

0-8194-4287-9

Conference