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Title
Manufacturing excellence: a global challenge. ASMC '94 proceedings
Corporate Author
Institute of Electrical and Electronics Engineers -IEEE-
Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.
Publisher
Publishing Place
Piscataway, NJ
Publication Date
1994
ISBN
0-7803-2053-0
0-7803-2054-9
0-7803-2055-7