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Title
Advances in chemical-mechanical polishing
Title Supplement
Symposium held April 13 - 15, 2004, San Francisco, California, U.S.A.; Papers presented at Symposium K, held at the 2004 MRS spring meeting
Person Involved
Publisher
Publishing Place
Pittsburgh, Pa.
Publication Date
2004
Series
Materials Research Society Symposium Proceedings; 816
ISBN
1-558-99766-0