Title

ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing. Conference proceedings

Title Supplement

September 13 - September 15, 2005, San Jose, California

Corporate Author

IEEE Electron Devices Society

IEEE Components, Packaging, and Manufacturing Technology Society

Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.

Japan Society of Applied Physics -JSAP-

Publisher

Publishing Place

Piscataway, NJ

Publication Date

2005

ISBN

0-7803-9143-8

Conference