Title

ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing. Conference proceedings
Titel Supplements
September 13 - September 15, 2005, San Jose, California
Institut
IEEE Electron Devices Society
IEEE Components, Packaging, and Manufacturing Technology Society
Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.
Japan Society of Applied Physics -JSAP-
Verlag
Verlagsort
Piscataway, NJ
Datum
2005
ISBN
0-7803-9143-8
Konferenz