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Title
ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing. Conference proceedings
Title Supplement
September 13 - September 15, 2005, San Jose, California
Corporate Author
IEEE Electron Devices Society
IEEE Components, Packaging, and Manufacturing Technology Society
Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.
Japan Society of Applied Physics -JSAP-
Publisher
Publishing Place
Piscataway, NJ
Publication Date
2005
ISBN
0-7803-9143-8