Title

Chemical physics of thin film deposition processes for micro- and nano-technologies

Title Supplement
Proceedings of the NATO Advanced Study Institute on Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies, Kaunas, Lithuania, 3 - 14 September 2001
Person Involved
Publisher
Publishing Place
Dordrecht
Publication Date
2002
Series
NATO science series. Series 2, Mathematics, physics, and chemistry; 55
ISBN
1-402-00524-5
Conference