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Title
Optical inspection and micromeasurements II
Title Supplement
Conference held as a part of the European Symposium on Lasers and Optics in Manufacturing, 16-19 June 1997, Munich
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
European Optical Society -EOS-
Publisher
Publishing Place
Bellingham, WA
Publication Date
1997
Series
Proceedings of SPIE; 3098
ISBN
0-8194-2518-4