Title

Laser Applications in Microelectronic and Optoelectronic Manufacturing, LAMOM XIX

Title Supplement

February 2014, San Francisco, California, United States

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2014

Series

Proceedings of SPIE; 8967

ISBN

978-0-8194-9880-9

Conference