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Title
International Symposium on Microelectronics 1997. Proceedings
Title Supplement
October 14 - 16, 1997, Pennsylvania Convention Center, Philadelphia
Corporate Author
International Microelectronics and Packaging Society -IMAPS-
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
1997
Series
Proceedings of SPIE; 3235
ISBN
0-930815-50-5