Title

25th European Mask and Lithography Conference

Title Supplement

12 - 15 January 2009, Dresden, Germany

Person Involved

Corporate Author

VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-

Publisher

Publishing Place

Bellingham, WA

Publication Date

2009

Series

Proceedings of SPIE; 7470

ISBN

978-0-8194-7770-5

Conference