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MEMS 2005 Miami, 18th IEEE International Conference on Micro Electro Mechanical Systems. Technical Digest
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Title
MEMS 2005 Miami, 18th IEEE International Conference on Micro Electro Mechanical Systems. Technical Digest
Publisher
IEEE Operations Center
Publishing Place
Piscataway, NJ
Publication Date
2005
ISBN
0-7803-8732-5
Conference
IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2005