Title

Mikro-System-Technik Chemnitz '07: Mikromechanik & Mikroelektronik

Title Supplement
8. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik, 14./15. November 2007
Person Involved
Corporate Author
TU Chemnitz
Publishing Place
Chemnitz
Publication Date
2007
ISBN
978-3-00-022168-2
Conference