Title

Micromachining of elements with optical and other submicrometer dimensional and surface specifications

Title Supplement

2-3 April 1987, The Hague, The Netherlands; Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering

Person Involved

Corporate Author

Association Nationale de la Recherche Technique -ANRT-

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

1987

Series

Proceedings of SPIE; 803

ISBN

0-89252-838-9

Conference