Title

20th Annual BACUS Symposium on Photomask Technology 2001. Proceedings

Title Supplement

13-15 Sepember 2000, Monterey, USA

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2001

Series

Proceedings of SPIE; 4186

ISBN

0-8194-3849-9

Conference