Title

Transducers '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Vol.1

Title Supplement

Boston, June 8 - 12, 2003. Digest of technical papers

Corporate Author

IEEE Electron Devices Society

Publisher

Publishing Place

Piscataway, NJ

Publication Date

2003

ISBN

0-7803-7731-1

Conference