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Title
Laser-based Micro- and Nanoprocessing XI
Title Supplement
San Francisco, California, United States, 31 January - 2 February 2017
Person Involved
Corporate Author
Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.
Publisher
Publishing Place
Bellingham, WA
Publication Date
2017
Series
Proceedings of SPIE; 10092