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III-V and IV-IV materials and processing challenges for highly integrated microelectronics and optoelectronics
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Title
III-V and IV-IV materials and processing challenges for highly integrated microelectronics and optoelectronics
Institut
Materials Research Society -MRS-
Verlag
MRS
Verlagsort
Warrendale, Pa.
Datum
1999
Serie
Materials Research Society symposia proceedings
ISBN
1-558-99441-6
Konferenz
Symposium D "Integration of Dissimilar Materials in Micro- and Optoelectronics" 1998
Symposium I "III-V and SiGe Group IV Device/IC Processing Challenges for Commerical Applications" 1998
Materials Research Society (Fall Meeting) 1998
