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Title
Proceedings of the 10th International Conference on Plasma Surface Engineering
Title Supplement
Garmisch-Partenkirchen, Germany, September 10 - 15, 2006
Corporate Author
European Joint Committee on Plasma and Ion Surface Engineering
Europäische Forschungsgesellschaft Dünne Schichten e.V. -EFDS-
Publisher
Publishing Place
Dresden
Publication Date
2006