Title

Smart Systems Integration 2015

Title Supplement
9th International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, Copenhagen, Denmark, 11 - 12 March 2015
Corporate Author
Fraunhofer-Institute for Electronic Nano Systems -ENAS-, Chemnitz
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin
Publisher
Publishing Place
Aachen
Publication Date
2015
ISBN
978-3-86359-296-7
Conference