Title

Dimensional Optical Metrology and Inspection for Practical Applications III

Title Supplement

Baltimore, Maryland, USA, May 5, 2014

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2014

Series

Proceedings of SPIE; 9110

ISBN

978-1-628-41047-1

Conference