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Title
Enabling Technologies for 3-D Integration
Title Supplement
Symposium held November 27-29, 2006, Boston, Massachusetts, U.S.A.
Person Involved
Corporate Author
Materials Research Society -MRS-
Publisher
Publishing Place
Pittsburgh, Pa.
Publication Date
2007
Series
Materials Research Society symposia proceedings; 970
ISBN
1-558-99927-2
978-1-558-99927-5