Title

Enabling Technologies for 3-D Integration

Title Supplement

Symposium held November 27-29, 2006, Boston, Massachusetts, U.S.A.

Person Involved

Corporate Author

Materials Research Society -MRS-

Publisher

Publishing Place

Pittsburgh, Pa.

Publication Date

2007

Series

Materials Research Society symposia proceedings; 970

ISBN

1-558-99927-2

978-1-558-99927-5

Conference