Title

Gas-phase and surface chemistry in electronic materials processing. Symposium

Person Involved

Corporate Author

Materials Research Society -MRS-

Publisher

Publishing Place

Pittsburgh, Pa.

Publication Date

1994

Series

Materials Research Society symposia proceedings; 334

ISBN

1-558-99233-2

Conference

Symposium on Gas-Phase and Surface Chemistry in Electronic Materials 1993

Materials Research Society (Fall Meeting) 1993