Title

MOEMS and miniaturized systems IX

Title Supplement

25 - 27 January 2010, San Francisco, California, United States; at SPIE Photonics West

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2010

Series

Proceedings of SPIE; 7594

ISBN

978-0-8194-7990-7

Conference