Title

Mikro-System-Technik Chemnitz 2012. Mikromechanik & Mikroelektronik

Title Supplement
11. Chemnitzer Fachtagung Mikromechanik & Mikroelektronik; 23./24. Oktober 2012
Person Involved
Corporate Author
TU Chemnitz
Publisher
Publishing Place
Chemnitz
Publication Date
2012
ISBN
978-3-00-039162-0
Conference