Title

IEEE Micro Electro Mechanical Systems, MEMS 2018

Title Supplement

Belfast, Northern Ireland, 21-25 January 2018

Corporate Author

Institute of Electrical and Electronics Engineers -IEEE-

Publisher

Publishing Place

Piscataway, NJ

Publication Date

2018

ISBN

978-1-5386-4782-0

978-1-5386-4554-3

978-1-5386-4783-7

Conference